High Purity Nitrogen Purification System for Semiconductor Applications
The carbon addition and deoxidation type nitrogen purification device further processes 99.9% of the nitrogen extracted from the nitrogen generation mechanism,causing 0.1% of the oxygen in the nitrogen to chemically react with a carbon deoxidizer to generate carbon dioxide,and further removes carbon dioxide and water vapor from the nitrogen, purifying the nitrogen to over 99.999% ,improving the quality of product gas,to adapt to industries with special requirements for gas purity and quality.
High Purity Nitrogen Purification System for Semiconductor Applications
Scope of application
Suitable for users of high-purity nitrogen,especially for magnetic materials,electronic industry and other processes that have strict requirements on oxygen and hy-drogen.
Technical Parameters
| Model | (Nm³/h) | DN(mm) Inlet/Outlet Diameter | (kg) Weight of carbon deoxidizer | Cooling water (t/h) | Applied power(kw) | Equipment area size(mm) | (HBTDC)Weight of 13 X molecular sieve(kg) | |||
| HBT | HBTDC | HBT | HBTDC | HBT | HBTDC | |||||
| HBT-130 | HBTDC-130 | ≤30 | DN25 | 130 | 0.2 | 9 | 12 | 2000*1350*2300 | 2500*1350*2300 | 75 |
| HBT-200 | HBTDC-200 | ≤60 | DN40 | 200 | 0.5 | 18 | 22.5 | 2200*1550*2600 | 2700*1550*2600 | 100 |
| HBT-240 | HBTDC-240 | ≤100 | DN40 | 240 | 0.8 | 24 | 30 | 2350*1850*2850 | 2850*1850*2850 | 160 |
| HBT-380 | HBTDC-380 | ≤150 | DN50 | 380 | 1.1 | 27 | 36 | 2650*1700*3350 | 3150*1700*3350 | 230 |
| HBT-430 | HBTDC-430 | ≤200 | DN50 | 430 | 1.5 | 39 | 48 | 3050*1700*3000 | 3550*1700*3000 | 230 |
| HBT-670 | HBTDC-670 | ≤250 | DN50 | 670 | 1.9 | 45 | 57 | 3250*1800*3100 | 3750*1800*3100 | 260 |
| HBT-720 | HBTDC-720 | ≤300 | DN65 | 720 | 2.2 | 45 | 57 | 3250*2100*3200 | 3750*2100*3200 | 260 |
| HBT-1200 | HBTDC-1200 | ≤400 | DN65 | 1200 | 3 | 54 | 66 | 3400*2100*3700 | 3900*2100*3700 | 260 |
| HBT-1440 | HBTDC-1440 | ≤600 | DN65 | 1440 | 4.4 | 75 | 90 | 3800*2950*3800 | 4300*2950*3800 | 380 |
| HBT-2400 | HBTDC-2400 | ≤1000 | DN65 | 2400 | 7.4 | 90 | 105 | 5350*2950*4000 | 5850*2950*4000 | 380 |
| Note:The above data is based on 0.8Mpa(G)feed air,ambient temperatuer20℃,0 m elevation and 80%relative humidity as design basis. Note 2:Power is calculated based on flow rate.The power in the table is determined according to the flow rate at a purity of 39%. | ||||||||||
