Ultra high purity Gas Purifier/Purification System/Generator

Application areas: electronic semiconductors, large-scale integrated circuits, MAMS, monocrystalline silicon polycrystalline silicon and silicon epitaxy, LED, TFT, gallium nitride, silicon carbide, scientific research and development, experimental analysis, etc.

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Characteristics

● Two towers alternate adsorption regeneration, automatic continuous operation.
● EP class 316L polished stainless steel pipe fittings.
● Removal rate up to 99.9999999% with 0.003 m filter.
● Siemens PLC can be connected to DCS system.
● The security alarm function is perfect.
● Remote cloud service is available.
● Production and assembly in a super clean environment.
● Gas capacity 10-20000nm3 /h.

Table Parameters

Series models

For gas

Raw gas index

Product gas index

H2O

CO2

CH4

Granularity

9VV

●

≤0.1ppb

—

≤0.1ppb

—

0.003μm

9OVV

●

—

●

≤0.1ppb

—

0.003μm

9VVX

—

●

≤0.1ppb

0.003μm

—

●

—

≤0.1ppb

—

≤0.1ppb

0.003μm

—

●

≤0.1ppb

0.003μm

—

●

—

≤0.1ppb

—

≤0.1ppb

0.003μm

Note: Common flow specifications：1-20000Nm3/h;Commonly used pressure：1-20Mpa

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